Experimental Vacuum Coating Equipment

Mode

HCLC-500

Vacuum chamber

500xH600mm

Coating

Semitransparent,gold, sliver, red blue, green,grey, black, rainbow color etc.

Power supply

DC power supply, MF power,electrical arc, power supply, filament (power) supply , active power supply,plused bias power supply

Vacuum chamber structure

Ertical single (side front )door (double water jacket type water cooling or sink type cooling ), pump system post position

Vacuum system

Molecular pump +Quasi oil free vacuum system for direct coupled rotary vane pump

Ultimate vacuum

5.0 x 10-5Pa (Noloading clean chamber )

Substrate dimension

120mm

Heating system

Room temperature to 500C adjustable and controllable (PID control), heating by stainless steel heater pipe

Work piece rotary

Top rotary bottom rotary +public rotation and frequency conversion step-less controllable and adjustable ,0-20 shift /min

Thickness rate

(1.5~5.0) %

Sputtering target

Two multi- arc, MF twin or flat target can be choiced

Pumping time

No- loading from air to 5x 10-2 pa < 6 mins

Work piece motion mode

6 axix/8 axix/9 axix Public rotation/ frequency control

Control mode

Manual/ automatic all-in one mode,touching screen + PLC

Remarks

We can design the dimension of the vacuum chamber according to customer's demand